Publications

38 results for Y.H. Lee

HEATING EFFECT IN HIGHLY CONDUCTING MATERIALS DURING PLASMA ETCHING.
- - Y.H. Lee
  - M. Chen
- 1983
- ECS Meeting 1983
STUDY OF SILICON CONTAMINATION AND NEAR-SURFACE DAMAGE CAUSED BY CF//4/H//2 REACTIVE ION ETCHING.
- - G.S. Oehrlein
  - R.M. Tromp
  - et al.
- 1983
- ECS Meeting 1983
ETCH ANISOTROPY OF UNDOPED POLYSILICON FILMS.
- - D. Favreau
  - M. Chen
  - et al.
- 1983
- ECS Meeting 1983
Reactive etching mechanism of tungsten silicide in CF₄-O₂ plasma
- - Young H. Lee
  - Mao-Min Chen
  - et al.
- 1984
- Thin Solid Films
Silicon etching mechanism and anisotropy in CF₄+O₂ plasma
- - Young H. Lee
  - Mao-Min Chen
- 1983
- Journal of Applied Physics
A transient capacitance study of radiation‐induced defects in aluminum‐doped silicon
- - Y.H. Lee
  - K.L. Wang
  - et al.
- 1980
- physica status solidi (a)
High‐temperature ion implantation in diamond
- - Y.H. Lee
  - P.R. Brosious
  - et al.
- 1978
- physica status solidi (a)
Electron paramagnetic resonance in diamond implanted at various energies and temperatures
- - P.R. Brosious
  - Y.H. Lee
  - et al.
- 1974
- physica status solidi (a)