118 results for
Gottlieb S. Oehrlein- Dominik Metzler
- Kishore Uppireddi
- et al.
- 2016
- JVSTA
- Dominik Metzler
- Florian Weilnboeck
- et al.
- 2015
- JVSTB
- Dominik Metzler
- Robert L. Bruce
- et al.
- 2013
- JVSTA
- Florian Weilnboeck
- D. Metzler
- et al.
- 2011
- Applied Physics Letters
- R. Bruce
- Florian Weilnboeck
- et al.
- 2011
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
- 2010
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
- 2009
- Plasma Processes and Polymers
- 2009
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- G.S. Oehrlein
- G.J. Coyle
- et al.
- 2004
- Surface and Interface Analysis