High-performance high-κ/metal gates for 45nm CMOS and beyond with gate-first processing
- M. Chudzik
- B. Doris
- et al.
- 2007
- VLSI Technology 2007
Publications
23 results for Mariko Takayanagi
Extendibility of NiPt silicide contacts for CMOS technology demonstrated to the 22-nm node
- Kazuya Ohuchi
- Christian Lavoie
- et al.
- 2007
- IEDM 2007
Challenge for high-k/metal gate CMOSFETs in 32 nm generation and beyond
- M. Takayanagi
- 2007
- ECS Meeting 2007