AI for Advanced Materials in Integration and Packaging
- Jed Pitera
- Eric A. Joseph
- et al.
- 2025
- MRS Fall Meeting 2025
Invited talk
Publications
82 results for Eric Joseph
The Semiconductor Supply Chain in an Era of Low GWP and/or PFAS-Free Gas Chemistries
- 2025
- SPIE Advanced Lithography 2025
Invited talkViability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas
- Aaron J. Windsor
- Jeremy C. Clark
- et al.
- 2025
- JVSTB
PaperPlasma Processing and the Semiconductor Supply Chain in an Era of Low GWP and/or PFAS-Free Gas Chemistries
- 2024
- CMC Conference 2024
Invited talkCentering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts
- 2024
- IEEE Trans Semicond Manuf
PaperMy path to AVS Fellow: Non-volatile Memory processing from fundamental understanding to the promise of atomic layer etching and sustainable etch precursors
- 2023
- AVS 2023
Invited talkEtching with electron beam-generated plasmas: Selectivity versus ion energy in silicon-based films
- S. G. Walton
- D. R. Boris
- et al.
- 2021
- JVSTA
PaperSignificance of plasma-photoresist interactions for atomic layer etching processes with extreme ultraviolet photoresist
- Adam Pranda
- Kang Yi Lin
- et al.
- 2020
- JVSTA
PaperPreface for the Festschrift Honoring Dr. Steve Rossnagel
- Ivan Petrov
- J. E. Greene
- et al.
- 2020
- JVSTA
EditorialSelective atomic layer etching of HfO2 over silicon by precursor and substrate-dependent selective deposition
- Kang Yi Lin
- Chen Li
- et al.
- 2020
- JVSTA
Paper