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Romain Lallement- Henry Kamberian
- Jed Rankin
- et al.
- 2024
- SPIE Photomask Technology + EUV Lithography 2024
- Romain Lallement
- Daniel Schmidt
- et al.
- 2023
- OEN 2023
- Martin Burkhardt
- Zheng Chen
- et al.
- 2022
- OEN 2022
- Jennifer Church
- Graham Jensen
- et al.
- 2021
- SPIE Photomask Technology + EUV Lithography 2021
- 2021
- SPIE Advanced Lithography 2021
- 2020
- J. Micro/Nanolithogr. MEMS MOEMS
- Michael Green
- Romain Lallement
- et al.
- 2020
- SPIE Advanced Lithography 2020
- 2020
- SPIE Advanced Lithography 2020
- Nicole Saulnier
- Yongan Xu
- et al.
- 2015
- SPIE Advanced Lithography 2015
