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Michael Guillorn- Markus Brink
- Isaac Lauer
- et al.
- 2014
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
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- et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
- M. Guillorn
- J. Chang
- et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
