Critical BEOL aspects of the fabrication of a thermally-assisted MRAM device
- E.J. O'sullivan
- Daniel C. Edelstein
- et al.
- 2015
- ECS Meeting 2015 Phoenix
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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33 results for Nathan Marchack
Characterization of TSV etch from a sustainability standpoint
- Osakpolo Isowamwen
- Nathan Marchack
- et al.
- 2023
- SPIE Advanced Lithography 2023
Control of sidewall roughness formation in through-silicon via etch at non-cryogenic temperatures
- John M. Papalia
- Devi Koty
- et al.
- 2022
- SPIE Advanced Lithography 2022
Trace-Gas Spectroscopy of Methane Using a Monolithically Integrated Silicon Photonic Chip Sensor
- Eric J. Zhang
- Yves Martin
- et al.
- 2019
- CLEO 2019
Monolithically integrated silicon photonic chip sensor for near-infrared trace-gas spectroscopy
- Eric J. Zhang
- Yves Martin
- et al.
- 2019
- SPIE DCS 2019
Silicon Photonic Gas Sensing
- William M. J. Green
- Eric J. Zhang
- et al.
- 2019
- OFC 2019
Localization and quantification of trace-gas fugitive emissions using a portable optical spectrometer
- Eric J. Zhang
- Chu C. Teng
- et al.
- 2018
- SPIE DCS 2018
Low-current spin transfer torque MRAM
- Guohan Hu
- J. J. Nowak
- et al.
- 2017
- VLSI-TSA 2017
Low-current Spin Transfer Torque MRAM
- Guohan Hu
- J. J. Nowak
- et al.
- 2017
- VLSI-DAT 2017
Reducing line edge roughness in si and sin through plasma etch chemistry optimization for photonic waveguide applications
- Nathan Marchack
- Marwan Khater
- et al.
- 2017
- SPIE Advanced Lithography 2017