Plasma processing for advanced microelectronics beyond CMOS
- Nathan Marchack
- L. Buzi
- et al.
- 2021
- Journal of Applied Physics
Publications
35 results for Nathan Marchack
Utilizing photosensitive polymers to evaluate UV radiation exposures in different plasma chamber configurations
- L. Buzi
- Hiroyuki Miyazoe
- et al.
- 2020
- JVSTA
Control of surface oxide formation in plasma-enhanced quasiatomic layer etching of tantalum nitride
- Nathan Marchack
- Jon L. Innocent-Dolor
- et al.
- 2020
- JVSTA
Spin-transfer torque MRAM with reliable 2 ns writing for last level cache applications
- Guohan Hu
- D. Kim
- et al.
- 2019
- IEDM 2019
Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: A physics and chemistry perspective
- Kenji Ishikawa
- Tatsuo Ishijima
- et al.
- 2019
- Japanese Journal of Applied Physics
Trace-Gas Spectroscopy of Methane Using a Monolithically Integrated Silicon Photonic Chip Sensor
- Eric J. Zhang
- Yves Martin
- et al.
- 2019
- CLEO 2019
Novel solder pads for self-aligned flip-chip assembly
- Yves Martin
- Swetha Kamlapurkar
- et al.
- 2019
- ECTC 2019
Monolithically integrated silicon photonic chip sensor for near-infrared trace-gas spectroscopy
- Eric J. Zhang
- Yves Martin
- et al.
- 2019
- SPIE DCS 2019
Utilizing surface modification in plasma-enhanced cyclic etching of tantalum nitride to surpass lithographic limits
- Nathan Marchack
- Keith Hernandez
- et al.
- 2019
- Plasma Processes and Polymers
Silicon Photonic Gas Sensing
- 2019
- OFC 2019