Publications

43 results for Nick Fuller

90 nm SiCOH technology in 300 mm manufacturing
- - L. Clevenger
  - M. Yoon
  - et al.
- 2004
- ADMETA 2004
Conference paper
Ash-induced modification of porous and dense SiCOH inter-level-dielectric (ILD) materials during damascene plasma processing
- - T. Dalton
  - N. Fuller
  - et al.
- 2004
- IITC 2004
Conference paper
Porous ILD process development for sub 100nm integration
- - K. Malone
  - S.T. Chen
  - et al.
- 2003
- ADMETA 2003
Conference paper