Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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40 results for Steven J. Holmes

High performance extremely thin SOI (ETSOI) hybrid CMOS with Si channel NFET and strained SiGe channel PFET
- - K. Cheng
  - A. Khakifirooz
  - et al.
- 2012
- IEDM 2012
Extremely thin SOI (ETSOI) CMOS with record low variability for low power system-on-chip applications
- - K. Cheng
  - A. Khakifirooz
  - et al.
- 2009
- IEDM 2009
22 nm technology compatible fully functional 0.1 μm ² 6T-sram cell
- - B. Haran
  - A. Kumar
  - et al.
- 2008
- IEDM 2008
A high performance 90 nm SOI technology with 0.992 μm² 6T-SRAM cell
- - Mukesh Khare
  - S. Ku
  - et al.
- 2002
- IEDM 2002
Simple and versatile methods to integrate directed self-assembly with optical lithography using a polarity-switched photoresist
- - Joy Y. Cheng
  - Daniel P. Sanders
  - et al.
- 2010
- ACS Nano
Critical BEOL aspects of the fabrication of a thermally-assisted MRAM device
- - E.J. O'sullivan
  - Daniel C. Edelstein
  - et al.
- 2015
- ECS Meeting 2015 Phoenix
Reducing line edge roughness in si and sin through plasma etch chemistry optimization for photonic waveguide applications
- - Nathan Marchack
  - Marwan Khater
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Directed self-assembly process implementation in a 300mm pilot line environment
- - Chi-Chun Liu
  - I. Cristina Estrada-Raygoza
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Development of KrF hybrid resist for a dual isolation application
- - Sen Liu
  - Steven Holmes
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Strain engineered extremely thin SOI (ETSOI) for high-performance CMOS
- - A. Khakifirooz
  - Kangguo Cheng
  - et al.
- 2012
- VLSI Technology 2012