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Leonidas E. Ocola- Yong-Lei Wang
- Xiaoyu Ma
- et al.
- 2018
- Nature Nanotechnology
- Juliano Borges
- Hongwen Yan
- et al.
- 2024
- SPIE Advanced Lithography 2024
- Franco Stellari
- Leonidas E. Ocola
- et al.
- 2022
- IPFA 2022
- J. Alexander Liddle
- Gregg M. Gallatin
- et al.
- 2002
- MRS Proceedings 2002
- Nabil D. Bassim
- Alexander J. Giles
- et al.
- 2018
- Applied Physics Letters
- Franco Stellari
- Ernest Y. Wu
- et al.
- 2023
- Microelectronics Reliability
- Leonidas E. Ocola
- James Bucchignano
- et al.
- 2022
- Journal of Vacuum Science and Technology B
- Ernest Wu
- Franco Stellari
- et al.
- 2022
- Applied Physics Letters