High resolution profiling using ion scattering and resonant nuclear reactions
- R.P. Pezzi
- R.M. Wallace
- et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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13 results for R.P. Pezzi
Interaction of SiC thermal oxidation by-products with SiO2
- C. Radtke
- F.C. Stedile
- et al.
- 2008
- Applied Physics Letters
Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
- R.P. Pezzi
- C. Krug
- et al.
- 2008
- Applied Physics Letters
Nuclear reaction analysis of 1H and 2H in hafnium silicate films on Si
- C. Driemeier
- R.P. Pezzi
- et al.
- 2008
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Post deposition annealing of Hf aluminate films on Si investigated by ion backscattering and nuclear reaction analyses
- L. Miotti
- R.P. Pezzi
- et al.
- 2008
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Advanced ion energy loss models: Applications to subnanometric resolution elemental depth profiling
- R.P. Pezzi
- P.L. Grande
- et al.
- 2007
- Surface Science
An analytical energy-loss line shape for high depth resolution in ion-beam analysis
- P.L. Grande
- A. Hentz
- et al.
- 2007
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Atomic transport and integrity of Al2O3(2.0 nm)/HfO2(2.5 nm) gate stacks on Si
- L. Miotti
- R.P. Pezzi
- et al.
- 2007
- Applied Physics Letters
Oxygen transport and reaction mechanisms in rhenium gate contacts on hafnium oxide films on Si
- R.P. Pezzi
- M. Copel
- et al.
- 2006
- Applied Physics Letters
Effect of oxide overlayer formation on the growth of gold catalyzed epitaxial silicon nanowires
- Hemanth Jagannathan
- Yoshio Nishi
- et al.
- 2006
- Applied Physics Letters