Nuclear reaction analysis of ¹H and ²H in hafnium silicate films on Si

Abstract

The 1H(15N,αγ)12C and 2H(3He,p)4He nuclear reactions were employed to detect, respectively, 1H and 2H in hafnium silicates films on Si. The methods employed to achieve quantitative analyses are described. Moreover, by performing annealing sequences in vacuum or O2 followed by 1H2 or 2H2, it was observed that the O2-preanneled films incorporate less H, either 1H or 2H. This was explained by O-deficient, H-trapping sites that are eliminated by the O2 preannealing. © 2008 Elsevier B.V. All rights reserved.