Publications

19 results for M. Steen

CVD rhenium and PVD tantalum gate MOSFETs fabricated with a replacement technique
- - James Pan
  - Don Canaperi
  - et al.
- 2004
- IEEE Electron Device Letters
Charge trapping in aggressively scaled metal gate/high-κ stacks
- - E. Gusev
  - V. Narayanan
  - et al.
- 2004
- IEDM 2004
Advanced gate stacks with fully silicided (FUSI) gates and high-κ dielectrics: Enhanced performance at reduced gate leakage
- - E. Gusev
  - C. Cabral Jr.
  - et al.
- 2004
- IEDM 2004
Systematic study of pFET V_t with Hf-based gate stacks with poly-Si and FUSI gates
- - E. Cartier
  - V. Narayanan
  - et al.
- 2004
- VLSI Technology 2004
A Simplified Hybrid Orientation Technology (SHOT) for high performance CMOS
- - B. Doris
  - Y. Zhang
  - et al.
- 2004
- VLSI Technology 2004
High performance thick copper inductors in an RF technology
- - Kunal Vaed
  - William Graham
  - et al.
- 2004
- SPIE Micromachining and Microfabrication 2004
Device Design Considerations for Ultra-Thin SOI MOSFETs
- - B. Doris
  - M. Ieong
  - et al.
- 2003
- IEDM 2003
Issues in NiSi-gated FDSOI device integration
- - Jakub Kedzierski
  - Diane Boyd
  - et al.
- 2003
- IEDM 2003
Fabrication and Mobility Characteristics of Ultra-thin Strained Si Directly on Insulator (SSDOI) MOSFETs
- - K. Rim
  - K.K. Chan
  - et al.
- 2003
- IEDM 2003