Imaging, Modeling and Engineering of Strain in Gate-All-Around Nanosheet TransitorsS. RebohV. Boureauet al.2019IEDM 2019
High performance UTBB FDSOI devices featuring 20nm gate length for 14nm node and beyondQ. LiuM. Vinetet al.2013IEDM 2013
Impact of source/drain silicon cap on FDSOI SiGe pMOSFET performanceE. AugendreS. Maitrejeanet al.2015S3S 2015
Strain, stress, and mechanical relaxation in fin-patterned Si/SiGe multilayers for sub-7 nm nanosheet gate-all-around device technologyS. RebohR. Coquandet al.2018Applied Physics Letters