Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for S.C. Shatas

ENHANCED DIFFUSION IN SHORT TIME ANNEALED ARSENIC AND BORON ION IMPLANTED SILICON.
- - T.O. Sedgwick
  - S. Cohen
  - et al.
- 1983
- ECS Meeting 1983
ENHANCED DIFFUSION IN SHORT TIME ANNEALED ARSENIC AND BORON ION IMPLANTED SILICON.
- - T.O. Sedgwick
  - S. Cohen
  - et al.
- 1983
- VLSI Science and Technology 1983
SHORT TIME ANNEALING OF As AND B ION IMPLANTED Si USING TUNGSTEN-HALOGEN LAMPS.
- - T.O. Sedgwick
  - R. Kalish
  - et al.
- 1983
- MRS Proceedings 1983
Transient enhanced diffusion in arsenic-implanted short time annealed silicon
- - R. Kalish
  - T.O. Sedgwick
  - et al.
- 1984
- Applied Physics Letters