Particle Elimination by Design Intervention
- G.S. Selwyn
- 1993
- ISSM 1993
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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25 results for G.S. Selwyn
Trapping and Behavior of Particulates in a Radio Frequency Magnetron Plasma Etching Tool
- Edward F. Patterson
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma particulate contamination control. II. Self-cleaning tool design
- Gary S. Selwyn
- Edward F. Patterson
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
In-situ Particulate Contamination Studies In Process Plasmas
- Gary S. Selwyn
- John S. McKillop
- et al.
- 1989
- Microelectronic Integrated Processing 1989
Laser diagnostic studies of particulate contamination generated by etching plasmas
- G.S. Selwyn
- 1989
- ICOPS 1989
LASER-INDUCED FLUORESCENCE DETECTION OF DIATOMIC PRODUCTS OF REACTIVE ION ETCHING: SiN, SiO, AND SiF.
- R.E. Walkup
- Ph. Avouris
- et al.
- 1983
- MRS Symposium 1983
COMPARATIVE MEASUREMENTS OF PLASMA O ATOM CONCENTRATION BY SIMULTANEOUS TWO-PHOTON LASER-INDUCED FLUORESCENCE AND OPTICAL EMISSION ACTINOMETRY.
- K.L. Saenger
- R.E. Walkup
- et al.
- 1983
- ECS Meeting 1983
Optical diagnostics of low pressure plasmas
- R.W. Dreyfus
- J.M. Jasinski
- et al.
- 2009
- Pure and Applied Chemistry
Across wafer etch rate uniformity in a high density plasma reactor: Experiment and modeling
- M. Surendra
- C.R. Guarnieri
- et al.
- 1995
- Applied Physics Letters
Optical characterization of particle traps
- G.S. Selwyn
- 1994
- Plasma Sources Science and Technology