Particle Elimination by Design Intervention
G.S. Selwyn
ISSM 1993
Particle contamination in a variety of plasma processes and tools has been studied using a real-time, in situ detection technique, rastered laser light scattering. In agreement with previous studies, particles were suspended in the plasma. The distribution of particles, however, is highly ordered and predictable, in contrast to the randomness which typifies particulate behavior in uncharged environments such as cleanrooms. The importance of electrostatic particle trapping is seen as a means of understanding this ordered distribution of particles, for predictive performance of process tools in manufacturing, and for contamination control in processing tools. The implications of these results on future plasma processing is briefly discussed.
G.S. Selwyn
ISSM 1993
K.L. Saenger, R.E. Walkup, et al.
ECS Meeting 1983
M. Dalvie, M. Surendra, et al.
Plasma Sources Science and Technology
G.S. Selwyn
Plasma Sources Science and Technology