IN SITU DOPED SILICON VIA LPCVD: INTERACTIONS OF THE DOPANT/SILANE/SILICON SURFACE SYSTEM.
- B.S. Meyerson
- M.L. Yu
- 1983
- ECS Meeting 1983
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66 results for Ming L. Yu
Phosphorus-Doped Polycrystalline Silicon via LPCVD: II. Surface Interactions of the Silane/Phosphine/Silicon System
- B.S. Meyerson
- M.L. Yu
- 2019
- JES
Charging effects in the secondary ion mass spectrometric analysis of targets containing low-conductivity regions
- W. Reuter
- M.L. Yu
- et al.
- 2008
- Journal of Applied Physics
The Effect of Work Function Change on the Sputtering of Si+ from Oxidized Si Surfaces
- Ming L. Yu
- 2007
- Physica Scripta
On the Velocity Dependences of Secondary Ion Emission from Metallic Surfaces
- Ming L. Yu
- 2006
- Radiation Effects and Defects in Solids
Trajectory Dependences of Charge Neutralization in Kev Ion/Surface Scattering
- Ming L. Yu
- Benjamin N. Eldridge
- 2006
- Radiation Effects and Defects in Solids
Performance of Zr/O/W Schottky emitters at reduced temperatures
- H.S. Kim
- M.L. Yu
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Energy distributions of Zr/O/W Schottky electron emission
- H.S. Kim
- M.L. Yu
- et al.
- 1997
- Journal of Applied Physics
Energy distributions of field emitted electrons from carbide tips and-tuncisten tips with dismondlike carbon coatinas
- Ming L. Yu
- Ho-Seob Kim
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Electron beam technology - SEM to microcolumn
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1996
- Microelectronic Engineering