W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
Hannaneh Hajishirzi, Julia Hockenmaier, et al.
UAI 2011
Jianke Yang, Robin Walters, et al.
ICML 2023
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003