Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
No abstract available.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
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PRX Quantum
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989