D.S. Turaga, K. Ratakonda, et al.
SCC 2006
D.S. Turaga, K. Ratakonda, et al.
SCC 2006
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
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SPIE Photomask Technology + EUV Lithography 2009