William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
K.N. Tu
Materials Science and Engineering: A
David B. Mitzi
Journal of Materials Chemistry
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting