Paper
The DX centre
T.N. Morgan
Semiconductor Science and Technology
Thin film deposition with physical vapor deposition (PVD) and related technology was studied. Variations of PVD processes include thermal evaporation, physical sputtering, laser ablation and arc-based emission. The modifications included reactive sputter deposition, the unbalanced magnetron, collimated and ionized sputter deposition.
T.N. Morgan
Semiconductor Science and Technology
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Frank Stem
C R C Critical Reviews in Solid State Sciences