The process variability of a V-band LC-VCO in 65nm SOI CMOS

Abstract

The process variability of a V-band LC-VCO implemented in 65nm SOI CMOS is examined. A complementary LC-VCO design, test set up, and measurements are presented. One lot of 300mm wafers are measured for statistics. There are 8 wafers in the lot, and 67 VCOs per wafer. The VCO frequency tuning range statistics, analog variability against digital benchmark, yield estimation, and intra- vs. inter-wafer variations are analyzed and discussed. The VCO average frequency tuning is 63.7-69.6GHz, and it shows 90% yield from 65.1 to 67.9GHz. © 2008 IEEE.