Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
A method of pore generation by supercritical CO2 (SCCO2) and co-solvent extraction for the preparation of nanohybrid film and mesoporous organosilicate thin film for ultralow dielectric constant materials is investigated. The films were treated with SCCO2/methyl ethyl ketone-tetrahydrofuran co-solvent combination and it was found that the treatment produced dielectric constant (k) values of 2.30 for closed-pore and 1.61 for open-pore nanohybrid films; 2.14 for cetyl trimethylammonium bromide-based and 2.50 for polyethylene glycol octadecyl ether-based films. These results suggest that the SCCO2/co-solvent treatment produces closely comparable results with thermal decomposition in terms of Fourier Transform Infrared spectroscopy data, optical constants obtained from variable angle spectroscopic ellipsometry, and k values. © 2007 Elsevier B.V. All rights reserved.
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
T.N. Morgan
Semiconductor Science and Technology
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997