Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
- A.A. Lubguban
- J.A. Lubguban
- et al.
- 2008
- Thin Solid Films
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Characterization of porous low- k films using variable angle spectroscopic ellipsometry
- M.T. Othman
- J.A. Lubguban
- et al.
- 2006
- Journal of Applied Physics