Supercritical CO2 treatments for semiconductor applications
- S. Gangopadhyay
- J.A. Lubguban
- et al.
- 2004
- MRS Proceedings 2004
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6 results for J.A. Lubguban
Creating nanoporosity by selective extraction of porogens using supercritical carbon dioxide/cosolvent processes
- B. Lahlouh
- T. Rajagopalan
- et al.
- 2003
- MRS Proceedings 2003
Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
- A.A. Lubguban
- J.A. Lubguban
- et al.
- 2008
- Thin Solid Films
Characterization of porous low- k films using variable angle spectroscopic ellipsometry
- M.T. Othman
- J.A. Lubguban
- et al.
- 2006
- Journal of Applied Physics
Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics
- J.A. Lubguban
- S. Gangopadhyay
- et al.
- 2004
- Journal of Materials Research
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
- T. Rajagopalan
- B. Lahlouh
- et al.
- 2003
- Applied Physics Letters