Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have observed prominent nonlinearities in differential conductance spectra of H 2 on copper surfaces using a low-temperature scanning tunneling microscope. These nonlinearities result from transitions between states of H 2 with distinct conductances. Tunneling electrons drive these transitions by giving up energy to highly coverage-dependent excitations that do not correspond to known vibrational or rotational modes of H 2. The nonlinear conductance features can be modeled by extending the conventional framework for inelastic electron tunneling spectroscopy to include saturation effects. ©2005 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Alnot, D.J. Auerbach, et al.
Surface Science
Hiroshi Ito, Reinhold Schwalm
JES
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures