Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Photoemission studies using synchrotron radiation show that laser-annealed Si(111)-(1×1) and Si(111)-(7×7) surfaces have very similar electronic structures; namely, both show (i) the same two surface states (each with a characteristic angular emission pattern), (ii) similar surface core-level spectra, and (iii) the same Fermi-level pinning. We observe that the (1×1) and cleaved (2×1) surfaces are not related as recently reported. Low-energy-electron-diffraction studies conclude that the (1×1) surface has a compressed ideal (1×1) geometry; this is inconsistent with a band-theory interpretation of our results. © 1981 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
John G. Long, Peter C. Searson, et al.
JES
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Robert W. Keyes
Physical Review B