C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
No abstract available.
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
P.C. Pattnaik, D.M. Newns
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films