Shallow junctions, silicide requirements and process technologies for sub 0.5 μm CMOS. Invited review paper

CMOS technology scaling dictates the reduction of the Source/Drain (S/D) junction depths to reduce punch-through and short channel effects. But simultaneously, lower contact resistances are needed as the device channel resistance decreases, low S/D junction sheet resistance is required for improved density, and low S/D junction leakage should be maintained for reduced stand-by power and longer refresh time. In this paper, these conflicting requirements and several key technology elements for shallow junctions, including silicide with thin TiSi2 and the application of rapid thermal processing (RTP) will be presented. 0.25 μm CMOS S/D with junctions depths in the range of 0.1μm-0.15μm and less than 10 Ω/□ sheet resistance, exhibiting low leakage and contact resistance are demonstrated. © 1992.