Process variation effects on circuit performance: TCAD simulation of 256-mbit technology

This paper describes the first study of the complete sequence from process simulation to circuit performance and the corresponding sensitivities for 0.25-//m technology. This is made possible by a combination of physically based process models and a systematic calibration involving SIMS, one-dimensional (1-D), and two-dimensional (2-D), device characteristics. Simulated nFET and pFET characteristics match hardware (HW) within 5-10% for both long-channel and nominal length devices. Simulated ring-oscillator performance is in good agreement with HW data. Sensitivities of device characteristics and the inverter gate delay to process variations (within 10%) are quantified. These investigations establish the correlation between process variations and circuit performance. © 1997 IEEE.