L.A. Nesbit, J. Alsmeier, et al.
IEDM 1993
This paper describes the first study of the complete sequence from process simulation to circuit performance and the corresponding sensitivities for 0.25-//m technology. This is made possible by a combination of physically based process models and a systematic calibration involving SIMS, one-dimensional (1-D), and two-dimensional (2-D), device characteristics. Simulated nFET and pFET characteristics match hardware (HW) within 5-10% for both long-channel and nominal length devices. Simulated ring-oscillator performance is in good agreement with HW data. Sensitivities of device characteristics and the inverter gate delay to process variations (within 10%) are quantified. These investigations establish the correlation between process variations and circuit performance. © 1997 IEEE.
L.A. Nesbit, J. Alsmeier, et al.
IEDM 1993
P. Oldiges, C.S. Murthy, et al.
SISPAD 2002
M. Yang, V. Chan, et al.
VLSI Technology 2004
L. Economikos, C.S. Murthy, et al.
IEMT 1998