William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry