PaperIon-surface interactions in plasma etchingJ.W. Coburn, H.F. Winters, et al.Journal of Applied Physics
PaperPlasma etching a "pseudo-black-box" approachHarold F. Winters, J.W. Coburn, et al.Journal of Applied Physics
PaperIon-induced volatilization (IIV): A method for quantitative measurement of the amounts of perfluoropolyether lubricant on a particulate disk surface and in the media porosityJ.W. Coburn, H.F. WintersJournal of Applied Physics
