PaperDual atom beam studies of etching and related surface chemistriesJ.W. CoburnPure and Applied Chemistry
PaperPlasma etching — a discussion of mechanismsJ.W. Coburn, Harold F. WintersCritical Reviews in Solid State and Materials Sciences
PaperPlasma-assisted etching of tungsten films: A quartz-crystal microbalance studyF. Fracassi, J.W. CoburnJournal of Applied Physics
