E. Occhiello, F. Garbassi, et al.
Plasma Chemistry and Plasma Processing
A study of the etching and deposition of plasma perfluoropolymer thin films has been carried out by using quartz-crystal microbalance methods for a range of feed gas mixtures.
E. Occhiello, F. Garbassi, et al.
Plasma Chemistry and Plasma Processing
F. Fracassi, J.W. Coburn
Journal of Applied Physics
J. Ahn, C.R. Perleberg, et al.
Journal of Applied Physics
V.J. Minkiewicz, M. Chen, et al.
Applied Physics Letters