J.W. Coburn, Eric Kay
Journal of Macromolecular Science: Part A - Chemistry
A study of the etching and deposition of plasma perfluoropolymer thin films has been carried out by using quartz-crystal microbalance methods for a range of feed gas mixtures.
J.W. Coburn, Eric Kay
Journal of Macromolecular Science: Part A - Chemistry
U. Gerlach-Meyer, J.W. Coburn, et al.
Surface Science
J.W. Coburn
JVSTA
J.W. Coburn, Eric Kay
Applied Physics Letters