Conference paper
Sub-halfmicron negative resist systems by image reversal
K. Chiong, H. Hiraoka
Proceedings of SPIE 1989
K. Chiong, H. Hiraoka
Proceedings of SPIE 1989
H. Hiraoka
Proceedings of SPIE 1989
H. Hiraoka, L.W. Welsh Jr.
ACS National Meeting 1983
J. Krishnaswamy, Mark Eyolfson, et al.
Proceedings of SPIE 1989