PaperContrast Enhancement and Resist Wall Profile Control by Surface CrosslinkageH. HiraokaJ. Photopolym. Sci. Tech.
Conference paperEnhancement of RIE resistance of conventional resist materialsH. HiraokaProceedings of SPIE 1989
Conference paperHigh resolution polymer pattern fabrications with Low energy proton beamsH. HiraokaMicrolithography 1984