PublicationMicrolithography 1986Conference paperSIMULTANEOUS VAPOR DEPOSITION OF METAL AND MONOMERIC COMPOUNDS: LITHOGRAPHIC APPLICATIONS.Microlithography 1986View publicationAbstractNo abstract available.Home↳ PublicationsDate09 Jul 1986PublicationMicrolithography 1986AuthorsH. HiraokaJ. DuranIBM-affiliated at time of publicationTopicsMathematical SciencesPhysical SciencesComputer ScienceShare
