Contrast Enhancement and Resist Wall Profile Control by Surface Crosslinkage

R.M. Macfarlane, R.L. Cone

Physical Review B - CMMP

C.M. Brown, L. Cristofolini, et al.

Chemistry of Materials

Arvind Kumar, Jeffrey J. Welser, et al.

MRS Spring 2000

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008