G.M. Wallraff, W.D. Hinsberg, et al.
SPIE Advances in Resist Technology and Processing 1999
The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.
G.M. Wallraff, W.D. Hinsberg, et al.
SPIE Advances in Resist Technology and Processing 1999
W.D. Hinsberg, F.A. Houle, et al.
Microlithography 2000
M.I. Sanchez, W.D. Hinsberg, et al.
SPIE Advances in Resist Technology and Processing 1999
F.A. Houle
Physical Review Letters