Publication
Applied Physics Letters
Paper

Photochemical generation and deposition of copper from a gas phase precursor

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Abstract

The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.

Date

01 Jan 1985

Publication

Applied Physics Letters

Authors

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