F.A. Houle, W.D. Hinsberg, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
F.A. Houle, W.D. Hinsberg, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
N. Zhou, K. Racette, et al.
SPIE Photomask Technology + EUV Lithography 2008
F.A. Houle
The Journal of Chemical Physics
K.A. Singmaster, F.A. Houle, et al.
CLEO 1987