F.A. Houle
The Journal of Chemical Physics
The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.
F.A. Houle
The Journal of Chemical Physics
G.M. Wallraff, John M. Hutchinson, et al.
Microelectronic Engineering
F.A. Houle
Proceedings of SPIE 1989
F.A. Houle, K.A. Singmaster
Journal of Physical Chemistry