W.D. Hinsberg, Scott A. MacDonald, et al.
Microlithography 1993
Paper
Mechanistic studies of chemically amplified photoresists
Related
W.D. Hinsberg, F.A. Houle, et al.
J. Photopolym. Sci. Tech.
R.D. Miller, G.M. Wallraff, et al.
Journal of Inorganic and Organometallic Polymers
R.D. Allen, I.Y. Wan, et al.
J. Photopolym. Sci. Tech.