PaperVisible laser-induced nucleation and growth of Cr, Mo, and W films from the hexacarbonyls. Reactivity of CO on film surfacesF.A. Houle, K.A. SingmasterJournal of Physical Chemistry
Conference paperOrigin of contaminants in metal films photochemically deposited from the metal hexacarbonyls.K.A. Singmaster, F.A. Houle, et al.CLEO 1987
PaperDetermination of coupled acid catalysis-diffusion processes in a positive-tone chemically amplified photoresistF.A. Houle, W.D. Hinsberg, et al.Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperEffect of resist components on image spreading during postexposure bake of chemically amplified resistsW.D. Hinsberg, F.A. Houle, et al.Microlithography 2000
