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Applied Physics Letters
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Phase separation in alloy-Si interaction

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Abstract

Phase separation has been found to be a general phenomenon among many alloy-Si interactions at temperatures as high as 800°C. We have studied these interactions with alloys consisting of a near-noble metal of Ni, Pd, and Pt, and a refractory metal of Cr, V, and W. The interaction produces a silicide of the near-noble metals next to the Si and an outer layer of silicide of the refractory metals. No evidence for ternary formation has been found.

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Applied Physics Letters

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