Publication
Applied Physics Letters
Paper

Phase separation in alloy-Si interaction

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Abstract

Phase separation has been found to be a general phenomenon among many alloy-Si interactions at temperatures as high as 800°C. We have studied these interactions with alloys consisting of a near-noble metal of Ni, Pd, and Pt, and a refractory metal of Cr, V, and W. The interaction produces a silicide of the near-noble metals next to the Si and an outer layer of silicide of the refractory metals. No evidence for ternary formation has been found.

Date

23 Jul 2008

Publication

Applied Physics Letters

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