Conference paper
Chemical and physical aspects of multilayer resist processing
J. Paraszczak, E. Babich, et al.
Proceedings of SPIE 1989
The paper describes an optical isolation operational amplifier designed to measure electrical current in the 10-11-10-6 A range at ±1000 V.
J. Paraszczak, E. Babich, et al.
Proceedings of SPIE 1989
N.J. Chou, M.W. Shafer
Surface Science
Y.H. Kim, Y.S. Chaug, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
N.J. Chou, B.L. Crowder
Journal of Applied Physics