Application of atomic-force microscopy to phase-shift masks
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
Scanned-probe techniques are providing nanometer-resolution images of surface properties and surface features. In this contribution we suggest a technique identifying these features by locally recording their optical spectra. The technique is based on a simple modification to a scanning force microscope where an optical beam is focused onto the sample and the change in contact potential difference between tip and sample is measured as a function of laser wavelength. The change in contact potential difference can be due either to local heating or to a change in the surface dipole moment caused by optical excitation of sample and/or tip. Initial results of spectra and images of Au on mica and Cr are presented. © 1992.
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
David W. Abraham, C.C. Williams, et al.
Journal of Microscopy
M. Nonnenmacher, M. Vaez-Iravani, et al.
Review of Scientific Instruments
J. Schneir, P.K. Hansma, et al.
Proceedings of SPIE 1989