Abstract
A high-resolution thermal microscope was demonstrated capable of imaging thermal fields with sub 1000-angstrom resolution. It is based on a noncontacting near-field thermal probe. The thermal probe consists of a thermocouple sensor on the end of a tip with sub 1000-angstrom dimensions. The probe tip is scanned in close proximity to a solid or liquid surface and the local temperature is mapped with a resolution determined by the size of the tip. Material-independent surface profiling was also demonstrated with the thermal probe, providing a lateral resolution of approximately 300 angstrom. Temperature mapping and surface profiling results are presented on both electronic and biological materials.