On the enhanced electron mobility in strained-silicon inversion layers

Abstract

The calculation of electron mobility in strained-silicon inversion layers accounting for scattering with phonons and interface roughness was studied. The strong carrier confinement in inversion layers removed the sixfold degeneracy of the conduction-band minima. The momentum relaxation rates relative to intravalley scattering with acoustic phonons were treated using the anisotropic model.