Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report lateral alignment of lamellar microdomains in thin films of poly(styrene-b-methyl methacrylate) (PS-b-PMMA) on corrugated surfaces where surface energy is controlled as non-selective to PS and PMMA by anchoring polymer brushes of a random copolymer of PS and PMMA. The orientational order determined by Herman's orientation function indicates that the lamellae align perpendicular to the direction of surface corrugation within a window of surface corrugation length scales used in this study. The effect of relative scales of periodicity and film thickness of PS-b-PMMA to those of surface corrugation on the alignment of lamellae is discussed in this paper. © The Royal Society of Chemistry 2009.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.Z. Sun
Journal of Applied Physics
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals