Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Large crystals of the NaBa2Nb5O15-type with K substitututions for Na have been grown in unseeded molten solutions fluxed with excess alkali carbonates. Curie temperatures and phase match temperatures of these crystals are decreased by the substitution of K for Na. Crystal compositions lie in the ternary NaNbO31bKNbO31bBaNb2O6 system and are proportionately BaNb2O6-rich as is the case for crystals pulled from nominally stoichiometric melts. The crystals exhibit 50 to 100 μ regions which are optically uniform. © 1969.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
Julien Autebert, Aditya Kashyap, et al.
Langmuir
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992