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Applied Physics Letters
Miniaturized electron-optical systems based on a field emission microsource and a microlens for probe forming have been studied. The performance of systems with dimensions (length and diameter) in the submillimeter to millimeters range can exceed that of a conventional system over a wide range of potentials (100 V to 10 kV) and working distances (up to 10 mm). © 1991 IEEE
K.Y. Lee, T.P. Smith III, et al.
Applied Physics Letters
Y. Vladimirsky, D. Kern, et al.
Nuclear Inst. and Methods in Physics Research, A
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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