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IEEE T-ED
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Miniature Electron-Optical Columns

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Abstract

Miniaturized electron-optical systems based on a field emission microsource and a microlens for probe forming have been studied. The performance of systems with dimensions (length and diameter) in the submillimeter to millimeters range can exceed that of a conventional system over a wide range of potentials (100 V to 10 kV) and working distances (up to 10 mm). © 1991 IEEE

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IEEE T-ED

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