Arrayed lithography using STM-based microcolumns
- T. H. Philip Chang
- Lawrence P. Muray
- et al.
- 1993
- SPIE Advanced Optical Technologies 1993
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
3 results for L.P. Muray
Arrayed miniature electron beam columns
- T.H.P. Chang
- L.P. Muray
- et al.
- 1993
- Microelectronic Engineering
Miniature Electron-Optical Columns
- T.H.P. Chang
- D. Kern
- et al.
- 1991
- IEEE T-ED