Publication
ASMC 2020
Conference paper

Middle of Line (MOL) Process Investigation in Ring Oscillator failure

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Abstract

Ring Oscillators (ROs) are used for yield learning during the research phase of a CMO technology. We performed cross-sections and showed that the open and short defects are in the middle of line (MOL) gate structures. The defects which are related to MOL or prior processes, as well as the design and density, will be discussed in the paper.

Date

01 Aug 2020

Publication

ASMC 2020

Authors

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