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Microelectronic Engineering
Detection of short-range interactions in combination with tunneling microscopy provides a means for characterizing the chemical nature of surfaces. Results are presented that demonstrate that carbon adsorbed on a rough, polycrystalline Ir surface can be detected on an atomic level. © 1994 The American Physical Society.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
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Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010